粉體行業在線展覽
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粉體行業在線展覽
FT-351
直接聯系
寧波瑞柯微智能科技有限公司
浙江寧波
FT-351高溫四探針電阻率測試系統
FT-351 high temperature four probe resistivity test system
一.概述：overview
采用四探針雙電組合測量方法測試方阻和電阻率系統與高溫箱結合配置高溫四探針測試探針治具與PC軟件對數據的處理和測量控制，解決半導體材料的電導率對溫度變化測量要求，軟件實時繪制出溫度與電阻，電阻率，電導率數據的變化曲線圖譜，及過程數據值的報表分析.
Adopt four probe double electric combination test method to test square resistance and resistivity system . Combined with high temperature box for special high temperature four-point probe test probe jig with PC software for data processing and measurement control. Meet the test requirements of the conductivity of the semiconductor material to temperature change. Advanced measurement and control software to Real-time render the change curve of temperature and resistance, the resistivity, the electrical conductivity data,and process data values statement analysis.
二.適用行業：Applicable industry:
用于：企業、高等院校、科研部門對導電陶瓷、硅、鍺單晶（棒料、晶片）電阻率、測定硅外延層、擴散層和離子注入層的方塊電阻以及測量導電玻璃（ITO）和其它導電薄膜等新材料方塊電阻、電阻率和電導率數據.
Is widely used in: Corporate. colleges and universities and scientific research departments of conductive ceramics. silicon. germanium single crystal (bar. wafer) resistivity. The determination of silicon epitaxial layer and diffusion layer and ion implantation of square resistance as well as the measurement of conductive glass (ITO) and other new materials such as conductive films square resistance and resistivity and conductivity data.
雙電測四探針儀是運用直線四探針雙位測量。設計參照單晶硅物理測試方法并參考美國 A.S.T.M 標準。
The double electric four-point probe is used to measure the four probes in a straight line.The design conforms to the national standard of the single-crystal silicon physical test method and the American A.S.T.M standard.
三.型號及參數Models and technical parameters：
規格型號Models | FT-351A | FT-351B | FT-351C |
1.方塊電阻范圍sheet resistance | 10-5～2×105Ω/□ | 10-6～2×105Ω/□ | 10-4～1×107Ω/□ |
2.電阻率范圍resistivity range | 10-6～2×106Ω-cm | 10-7～2×106Ω-cm | 10-5～2×108Ω-cm |
3.測試電流范圍test current range | 0.1μA.μA.0μA，100μA，1mA，10mA，100 mA | 1A、100mA、10mA、1mA、100uA、10uA、1uA、0.1uA | 10mA ---200pA |
4.電流精度current accuracy | ±0.1%讀數 | ±0.1讀數 | ±2% |
5.電阻精度resistance accuracy | ≤0.3% | ≤0.3% | ≤10% |
PC軟件界面 PC software interface | 顯示：電阻、電阻率、方阻、溫度、單位換算、溫度系數、電流、電壓、探針形狀、探針間距、厚度 、電導率 LCD: resistance.resistivity. sheet resistance. temperature.unit conversion. temperature coefficient. current. voltage. probe shape. probe spacing. thickness | ||
7.測試方式test mode | 雙電測量Double electrical measurement | ||
8.四探針儀工作電源working power | AC 220V±10%.50Hz <30W
| ||
9.誤差/ errors | ≤3%（標準樣片結果 standard samples） | ≤15% | |
溫度(選購)Highest temperature (choose and buy) | 常溫 Normal temperature -400℃；600℃；800℃；1000℃；1200℃；1400℃；1600℃ | ||
氣氛保護（氣體客戶自備） Atmosphere protection(Gas was provided by customers themselves) | 常用氣體如下：氦(He)、氖(Ne)、氬(Ar)、氪(Kr)、氙(Xe)、氡(Rn)，均為無色、無臭、氣態的單原子分子 The usual gases are: helium (He). neon (Ne). argon (Ar). krypton (Kr). xenon (Xe). and radon (Rn). all in colorless. odorless. gaseous monatomic molecules. | ||
溫度精度 Temperature precision | 沖溫值 Blunt temperature values：≤1-3℃；控溫精度 control precision：±1°C | ||
升溫速度： rate of temperature increase | 常溫開始400℃--800℃需要15分鐘；800℃-1200℃需要30分鐘；1400℃-1600℃需要250分鐘—300分鐘 About 15 minutes at room temperature to 400 ℃. 800 ℃;800 ℃ to 1200 ℃ need 30 minutes;1400 ℃ to 1600 ℃ to 250 minutes. 300 minutes | ||
高溫材料 High temperature material | 采用復合陶瓷纖維材料，具有真空成型，高溫不掉粉的特征Adopt composite ceramic fiber material. have vacuum forming. high temperature not drop powder | ||
PC軟件 PC software | 測試PC軟件一套，USB通訊接口，軟件界面同步顯示、分析、保存和打印數據！ PC software. USB communication interface. software interface synchronization display. analysis. save and print data! | ||
電極材料 Electrode materials | 鎢電極或鉬電極 Tungsten electrode or molybdenum electrode | ||
探針間距 The probe spacing | 直線型探針，探針中心間距：4mm；樣品要求大于13mm直徑Linear probe. probe center spacing: 4mm;Sample requirements are greater than 13mm diameter | ||
標配外（選購）： Except standard configuration (optional) | 電腦和打印機1套；2.標準電阻1-5個； 1 . One set computer and printer 2.Standard resistance 1 to 5pcs | ||
高溫電源： High temperature power | 供電：400-1200℃ 電源220V，功率4KW；380V;1400℃-1600℃電源380V；功率9KW： Power supply: 400-1200 ℃ power 220 v. 4 kw power;380 v;1400 ℃ to 1600 ℃ power supply380V ; power 9KW | ||
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