體積小,重量輕 (21 kg）,結構緊湊

易于攜帶

可采用SD卡存儲數據

方便數據存儲及管理

提供9種語言的控制面板

操作簡便,國際通用

Test Method

Vacuum and Sniffing

Detectable gases

4He, 3He, H2

Min detectable leak – vacuum

mbar l/s

≤ 5 · 10-12

Min detectable leak – sniffing

mbar l/s

≤ 1 · 10-7

Pumping speed for He

l/s

1.1

Maximum inlet test pressure

hPa

15

Backing pump type

type

Diaphragm pump

Backing Pump Capacity

m3/h

1.7

Communications Interface

RS232 + Analog

Start-up time (20° C)

min

<2

Operating Temp

celsius

10° – 40° C

Dimensions

mm

350 x 245 x 414

Weight

kg

21

進氣口壓力達到100 hPa 即可測漏

應用范圍廣

可采用真空法和吸槍模式進行氦氣和氫氣泄漏檢測

操作靈活

取代舊機型并且完全兼容

可兼容原有型號的配件

高性能真空系統

在其同類產品中測試時間*快

干式型號 340 D 版本無油

適用于潔凈制程

Test Method

Vacuum & Sniffing

Vacuum & Sniffing

Vacuum & Sniffing

Detectable gases

4He, 3He, H2

4He, 3He, H2

4He, 3He, H2

Min detectable leak – vacuum

mbar l/s

≤ 5 · 10-12

≤ 5 · 10-12

≤ 5 · 10-12

Min detectable leak – sniffing

mbar l/s

≤ 5 · 10-9

≤ 5 · 10-9

≤ 5 · 10-9

Pumping speed for He

l/s

2.5

2.5

2.5

Maximum inlet test pressure

hPa

25

25

25

Backing pump type

type

 Rotary vane pump

Diaphragm pump

None

Backing Pump Capacity

m3/h

15

3.4

–

Communications Interface

RS232, Ethernet, Bluetooth

Start-up time (20° C)

min

<3

<3

<3

Operating Temp

celsius

0° to 45°

0° to 35°

0° to 40°

Dimensions

mm

393 x 547 x 375

393 x 547 x 375

393 x 547 x 375

Weight

kg

56

45

32

可操作性高、設計緊湊

即使在狹小的空間中也可輕松進入測試區域

在同級別前級泵中具有**抽速 (35 m3/h） 以及高氦氣抽速 (10 或 25 l/s）

快速、準確、可靠的泄漏檢測

集成置物空間,可存放工具、真空波紋管和配件等

便于配件使用及管理

Test Method

Vacuum & Sniffing

Detectable gases

4He,3He,H2

Min detectable leak – vacuum

mbar l/s

≤ 1 · 10-12

Min detectable leak – sniffing

mbar l/s

≤ 1 · 10-8

Pumping speed for He

l/s

25

Maximum inlet test pressure

hPa

20

Backing pump type

type

friction-less ACP pump

Backing Pump Capacity

m3/h

35

Communications Interface

RS232, Digital, Analog

Start-up time (20° C)

min

<2

Operating Temp

celsius

10° to 35°

Dimensions

mm

1072 x 454 x 1025

Weight

kg

130

緊湊、堅固、模塊化系統

可任意角度安裝集成于系統中

可通過 PC 或 PLC 進行操作

無需操作面板,節省成本

通訊接口多樣

方便兼容各種終端設備

Test Method

Vacuum & Sniffing

Detectable gases

4He,3He, H2

Min detectable leak – vacuum

mbar l/s

≤ 5 · 10-12

Min detectable leak – sniffing

mbar l/s

≤ 1.5 · 10-8

Pumping speed for He

l/s

6

Maximum inlet test pressure

hPa

18

Backing pump type

type

None

Backing Pump Capacity

m3/h

Communications Interface

RS232,  Digital, Analog, USB

Start-up time (20° C)

min

<3

Operating Temp

celsius

10° to 45°

Dimensions

mm

279 x 264 x 197;216 x 317 x 111;241 x 54 x 133

Weight

kg

15+5+1.3