產品圖片：

產品型號：

CS-200

產品介紹：

Dense carbon film for high temp. anneal

Max. Substrate φ200㎜（Transfer tray available）

產品特點：

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• 1. Key point for carbon process
  - Front(Ion Implantation) and Back(Annealing) processes are well known.

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• 2. Good process experience for CC deposition
  - AIST and SIC production company uses ULVAC system.

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•  3. Optional items
  - High temp stage, RF stage bias, 3MFC line, DRP, etc.